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Postgrowth annealing of YBa2Cu3O7-x thin films in an electron cyclotron resonance oxygen plasma

dc.contributor.authorFrançois, Isabel
dc.contributor.authorBorghs, Gustaaf
dc.date.accessioned2021-09-29T12:41:23Z
dc.date.available2021-09-29T12:41:23Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/161
dc.sourceIIOimport
dc.titlePostgrowth annealing of YBa2Cu3O7-x thin films in an electron cyclotron resonance oxygen plasma
dc.typeJournal article
dc.contributor.imecauthorBorghs, Gustaaf
dc.source.peerreviewno
dc.source.beginpage3011
dc.source.endpage3013
dc.source.journalAppl. Phys. Lett.
dc.source.volume65
imec.availabilityPublished - imec


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