Dry etching process for bulk finFET manufacturing

dc.contributor.author	Shamiryan, Denis
dc.contributor.author	Redolfi, Augusto
dc.contributor.author	Boullart, Werner
dc.date.accessioned	2021-10-18T02:57:06Z
dc.date.available	2021-10-18T02:57:06Z
dc.date.issued	2009
dc.identifier.issn	0167-9317
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/16209
dc.source	IIOimport
dc.title	Dry etching process for bulk finFET manufacturing
dc.type	Journal article
dc.contributor.imecauthor	Redolfi, Augusto
dc.contributor.imecauthor	Boullart, Werner
dc.contributor.orcidimec	Boullart, Werner::0000-0001-7614-2097
dc.date.embargo	9999-12-31
dc.source.peerreview	yes
dc.source.beginpage	96
dc.source.endpage	98
dc.source.journal	Microelectronic Engineering
dc.source.issue	1
dc.source.volume	86
imec.availability	Published - open access