Charge carrier mobility for advanced high-k/metal gate MOSFET in CMOS technology. An experimental study
dc.contributor.author | Trojman, Lionel | |
dc.date.accessioned | 2021-10-18T03:43:25Z | |
dc.date.available | 2021-10-18T03:43:25Z | |
dc.date.issued | 2009-11 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16323 | |
dc.source | IIOimport | |
dc.title | Charge carrier mobility for advanced high-k/metal gate MOSFET in CMOS technology. An experimental study | |
dc.type | PHD thesis | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.contributor.thesisadvisor | Groeseneken, Guido | |
dc.contributor.thesisadvisor | Maes, Herman | |
imec.availability | Published - open access |