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The effect of composition on the bond structure and refractive index of silicon nitride

dc.contributor.authorVerlaan, Vasco
dc.contributor.authorVerkerk, A.D.
dc.contributor.authorArnoldbik, W.M.
dc.contributor.authorVan der Werf, C.H.M.
dc.contributor.authorBakker, R.
dc.contributor.authorHouweling, Z.S.
dc.contributor.authorRomijn, I.G.
dc.contributor.authorBorsa, D.M.
dc.contributor.authorWeeber, A.W.
dc.contributor.authorLuxembourg, S.L.
dc.contributor.authorZeman, M.
dc.contributor.authorDekkers, Harold
dc.contributor.authorSchropp, R.E.I.
dc.date.accessioned2021-10-18T04:50:36Z
dc.date.available2021-10-18T04:50:36Z
dc.date.issued2009
dc.identifier.issn0040-6090
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16482
dc.sourceIIOimport
dc.titleThe effect of composition on the bond structure and refractive index of silicon nitride
dc.typeJournal article
dc.contributor.imecauthorDekkers, Harold
dc.contributor.orcidimecDekkers, Harold::0000-0003-4778-5709
dc.source.peerreviewyes
dc.source.beginpage3499
dc.source.endpage3502
dc.source.journalThin Solid Films
dc.source.volume517
imec.availabilityPublished - imec


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