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Combined reflectometry-ellipsometry technique to measure graphite down to monolayer thickness

dc.contributor.authorWang, Wei-E
dc.contributor.authorBalooch, M.
dc.contributor.authorClaypool, C.
dc.contributor.authorZawaideh, M.
dc.contributor.authorFarnaam, K.
dc.date.accessioned2021-10-18T05:10:11Z
dc.date.available2021-10-18T05:10:11Z
dc.date.issued2009
dc.identifier.issn0038-111X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16526
dc.sourceIIOimport
dc.titleCombined reflectometry-ellipsometry technique to measure graphite down to monolayer thickness
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpage18
dc.source.endpage21
dc.source.journalSolid State Technology
dc.source.issue6
dc.source.volume52
imec.availabilityPublished - imec


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