SiGe MEMS technology
| dc.contributor.author | Witvrouw, Ann | |
| dc.date.accessioned | 2021-10-18T05:22:03Z | |
| dc.date.available | 2021-10-18T05:22:03Z | |
| dc.date.issued | 2009 | |
| dc.identifier.issn | ? | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16553 | |
| dc.source | IIOimport | |
| dc.title | SiGe MEMS technology | |
| dc.type | Journal article | |
| dc.source.peerreview | no | |
| dc.source.journal | MEMS Industry Group (MIG) Newsletter | |
| dc.identifier.url | http://www.memsindustrygroup.org/4a/pages/index.cfm?pageid=3745 | |
| imec.availability | Published - imec |
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