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SiGe MEMS Technology

dc.contributor.authorWitvrouw, Ann
dc.contributor.authorSeveri, Simone
dc.contributor.authorHelin, Philippe
dc.contributor.authorHaspeslagh, Luc
dc.date.accessioned2021-10-18T05:23:15Z
dc.date.available2021-10-18T05:23:15Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16556
dc.sourceIIOimport
dc.titleSiGe MEMS Technology
dc.typeJournal article
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorHaspeslagh, Luc
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage30
dc.source.endpage33
dc.source.journalFuture Fab
dc.source.issue29
dc.identifier.urlhttp://www.future-fab.com/welcome.asp
imec.availabilityPublished - open access


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