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Atomic layer deposition of gadolinium aluminate layers using Gd(iPrCp)3, TMA, and O3 or H2O

dc.contributor.authorAdelmann, Christoph
dc.contributor.authorPierreux, Dieter
dc.contributor.authorSwerts, Johan
dc.contributor.authorDewulf, Daan
dc.contributor.authorHardy, An
dc.contributor.authorTielens, Hilde
dc.contributor.authorFranquet, Alexis
dc.contributor.authorBrijs, Bert
dc.contributor.authorMoussa, Alain
dc.contributor.authorConard, Thierry
dc.contributor.authorVan Bael, Marlies
dc.contributor.authorMaes, Jan
dc.contributor.authorJurczak, Gosia
dc.contributor.authorKittl, Jorge
dc.contributor.authorVan Elshocht, Sven
dc.date.accessioned2021-10-18T15:15:03Z
dc.date.available2021-10-18T15:15:03Z
dc.date.issued2010
dc.identifier.issn0948-1907
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16626
dc.sourceIIOimport
dc.titleAtomic layer deposition of gadolinium aluminate layers using Gd(iPrCp)3, TMA, and O3 or H2O
dc.typeJournal article
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorPierreux, Dieter
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorTielens, Hilde
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.imecauthorMaes, Jan
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.source.peerreviewyes
dc.source.beginpage170
dc.source.endpage178
dc.source.journalChemical Vapor Deposition
dc.source.issue4_6
dc.source.volume16
dc.identifier.urlhttp://www3.interscience.wiley.com/journal/123552061/abstract
imec.availabilityPublished - imec


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