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Optical force measurement system with mirror probe for nanoprobing inside a scanning electron microscope

dc.contributor.authorArstila, Kai
dc.contributor.authorHantschel, Thomas
dc.contributor.authorKleindiek, Stephan
dc.contributor.authorSterr, Jochen
dc.contributor.authorVaquette, Quentin
dc.contributor.authorDemeulemeester, Cindy
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-18T15:16:25Z
dc.date.available2021-10-18T15:16:25Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16673
dc.sourceIIOimport
dc.titleOptical force measurement system with mirror probe for nanoprobing inside a scanning electron microscope
dc.typeJournal article
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1410
dc.source.endpage1412
dc.source.journalMicroelectronic Engineering
dc.source.issue5_8
dc.source.volume87
imec.availabilityPublished - open access
imec.internalnotesProc. 35th Int. Conf. on Micro & Nano Engineering (MNE 2009)


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