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Pulsed laser deposition of bismuth telluride thin films for microelectromechanical systems thermoelectric energy harvesters

dc.contributor.authorAziz, Ahmed
dc.contributor.authorElsayed, Mohannad
dc.contributor.authorAbu Bakr, Hassan
dc.contributor.authorEl Rifai, Joumana
dc.contributor.authorVan der Donck, Tom
dc.contributor.authorCelis, Jean-Pierre
dc.contributor.authorLeonov, Vladimir
dc.contributor.authorFiorini, Paolo
dc.contributor.authorSedky, Sherif
dc.date.accessioned2021-10-18T15:16:55Z
dc.date.available2021-10-18T15:16:55Z
dc.date.issued2010
dc.identifier.issn0361-5235
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16684
dc.sourceIIOimport
dc.titlePulsed laser deposition of bismuth telluride thin films for microelectromechanical systems thermoelectric energy harvesters
dc.typeJournal article
dc.contributor.imecauthorLeonov, Vladimir
dc.contributor.orcidimecLeonov, Vladimir::0000-0002-4364-8945
dc.date.embargo9999-12-31
dc.identifier.doi10.1007/s11664-009-1047-1
dc.source.peerreviewyes
dc.source.beginpage1920
dc.source.endpage1925
dc.source.journalJournal of Electronic Materials
dc.source.issue9
dc.source.volume39
imec.availabilityPublished - open access


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