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In situ bow monitoring: towards uniform blue and green InGaN/GaN quantum well structures grown on 100mm sapphire substrates by MOVPE

dc.contributor.authorCheng, Kai
dc.contributor.authorDegroote, Stefan
dc.contributor.authorLeys, Maarten
dc.contributor.authorZhang, Liyang
dc.contributor.authorDerluyn, Joff
dc.contributor.authorGermain, Marianne
dc.contributor.authorBorghs, Gustaaf
dc.date.accessioned2021-10-18T15:33:15Z
dc.date.available2021-10-18T15:33:15Z
dc.date.issued2010
dc.identifier.issn1610-1634
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16853
dc.sourceIIOimport
dc.titleIn situ bow monitoring: towards uniform blue and green InGaN/GaN quantum well structures grown on 100mm sapphire substrates by MOVPE
dc.typeJournal article
dc.contributor.imecauthorBorghs, Gustaaf
dc.source.peerreviewyes
dc.source.beginpage2082
dc.source.endpage2084
dc.source.journalPhysica Status Solidi C
dc.source.issue7_8
dc.source.volume7
imec.availabilityPublished - imec


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