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Diffraction gratings fabricated in DLC thin flms

dc.contributor.authorCirino, Giuseppe
dc.contributor.authorMansano, Ronaldo
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorJasinevicius, R.G.
dc.contributor.authorGoncalves Neto, Luiz
dc.date.accessioned2021-10-18T15:36:09Z
dc.date.available2021-10-18T15:36:09Z
dc.date.issued2010
dc.identifier.issn0257-8972
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16872
dc.sourceIIOimport
dc.titleDiffraction gratings fabricated in DLC thin flms
dc.typeJournal article
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage2966
dc.source.endpage2970
dc.source.journalSurface and Coatings Technology
dc.source.issue18_19
dc.source.volume204
imec.availabilityPublished - open access


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