Improvement of the poly-SiGe electrode contact technology for MEMS
dc.contributor.author | Claes, Gert | |
dc.contributor.author | Severi, Simone | |
dc.contributor.author | Celis, Jean-Pierre | |
dc.contributor.author | Witvrouw, Ann | |
dc.date.accessioned | 2021-10-18T15:36:54Z | |
dc.date.available | 2021-10-18T15:36:54Z | |
dc.date.issued | 2010 | |
dc.identifier.issn | 0960-1317 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16877 | |
dc.source | IIOimport | |
dc.title | Improvement of the poly-SiGe electrode contact technology for MEMS | |
dc.type | Journal article | |
dc.contributor.imecauthor | Severi, Simone | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 95029 | |
dc.source.journal | Journal of Micromechanics and Microengineering | |
dc.source.issue | 9 | |
dc.source.volume | 20 | |
imec.availability | Published - open access |