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The 2009 ITRS roadmap: EHS and heterogeneous challenges

dc.contributor.authorDeclerck, Gilbert
dc.date.accessioned2021-10-18T15:55:59Z
dc.date.available2021-10-18T15:55:59Z
dc.date.issued2010
dc.identifier.issn1363-5182
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16989
dc.sourceIIOimport
dc.titleThe 2009 ITRS roadmap: EHS and heterogeneous challenges
dc.typeJournal article
dc.contributor.imecauthorDeclerck, Gilbert
dc.source.peerreviewno
dc.source.beginpage14
dc.source.journalFuture Fab International
dc.source.issue32
dc.identifier.urlhttp://www.future-fab.com/content/PDF/FF32_ITRS_Jan_10.pdf
imec.availabilityPublished - imec


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