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dc.contributor.authorDictus, Dries
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorPikulev, Vitaly
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorVinckier, Chris
dc.contributor.authorBoullart, Werner
dc.contributor.authorVanhaelemeersch, Serge
dc.date.accessioned2021-10-18T16:03:35Z
dc.date.available2021-10-18T16:03:35Z
dc.date.issued2010
dc.identifier.issn0743-7463
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17025
dc.sourceIIOimport
dc.titleUnusual modification of CuCl or CuBr films by He plasma exposure resulting in nanowire formation
dc.typeJournal article
dc.contributor.imecauthorDictus, Dries
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorVanhaelemeersch, Serge
dc.contributor.orcidimecDictus, Dries::0000-0002-7896-1747
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.contributor.orcidimecVanhaelemeersch, Serge::0000-0003-2102-7395
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage2014
dc.source.endpage2020
dc.source.journalLangmuir
dc.source.issue3
dc.source.volume26
imec.availabilityPublished - open access


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