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Impact of metal etch residues on etch species density and uniformity

dc.contributor.authorDictus, Dries
dc.contributor.authorShamiryan, Denis
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorBoullart, Werner
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorVinckier, Chris
dc.date.accessioned2021-10-18T16:03:48Z
dc.date.available2021-10-18T16:03:48Z
dc.date.issued2010
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17026
dc.sourceIIOimport
dc.titleImpact of metal etch residues on etch species density and uniformity
dc.typeJournal article
dc.contributor.imecauthorDictus, Dries
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecDictus, Dries::0000-0002-7896-1747
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewyes
dc.source.beginpage789
dc.source.endpage794
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue4
dc.source.volume28
imec.availabilityPublished - imec


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