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Metal surface micromachining technologies for implementation in RF-MEMS switching devices

dc.contributor.authorEkkels, Phillip
dc.date.accessioned2021-10-18T16:11:03Z
dc.date.available2021-10-18T16:11:03Z
dc.date.issued2010-03
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17060
dc.sourceIIOimport
dc.titleMetal surface micromachining technologies for implementation in RF-MEMS switching devices
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorPuers, Bob
dc.contributor.thesisadvisorMertens, Robert
imec.availabilityPublished - open access


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