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P+/N junction leakage in thin selectively grown Ge-in-STI substrates

dc.contributor.authorEneman, Geert
dc.contributor.authorYang, Rui
dc.contributor.authorWang, Gang
dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorLoo, Roger
dc.contributor.authorClaeys, Cor
dc.contributor.authorCaymax, Matty
dc.contributor.authorMeuris, Marc
dc.contributor.authorHeyns, Marc
dc.contributor.authorSimoen, Eddy
dc.date.accessioned2021-10-18T16:15:02Z
dc.date.available2021-10-18T16:15:02Z
dc.date.issued2010
dc.identifier.issn0040-6090
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17077
dc.sourceIIOimport
dc.titleP+/N junction leakage in thin selectively grown Ge-in-STI substrates
dc.typeJournal article
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewyes
dc.source.beginpage2489
dc.source.endpage2492
dc.source.journalThin Solid Films
dc.source.issue9
dc.source.volume518
imec.availabilityPublished - imec
imec.internalnotesE-MRS conference 2009 Spring Meeting Symposium I


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