Mikroantrieb in MEMS-Technik nach dem Inchworm-Prinzip
| dc.contributor.author | Erismis, Mehmet Akif | |
| dc.date.accessioned | 2021-10-18T16:15:48Z | |
| dc.date.available | 2021-10-18T16:15:48Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17080 | |
| dc.source | IIOimport | |
| dc.title | Mikroantrieb in MEMS-Technik nach dem Inchworm-Prinzip | |
| dc.type | Journal article | |
| dc.source.peerreview | no | |
| dc.source.beginpage | 44 | |
| dc.source.endpage | 45 | |
| dc.source.journal | Markt&Technik | |
| dc.source.issue | 22 | |
| imec.availability | Published - imec |
Files in this item
| Files | Size | Format | View |
|---|---|---|---|
|
There are no files associated with this item. |
|||