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Growth and characterization of nanodiamond layers prepared using the plasma-enhanced linear antennas microwave CVD system

dc.contributor.authorFendrych, F.
dc.contributor.authorTaylor, A.
dc.contributor.authorPeksa, A.
dc.contributor.authorKratochvilova, I.
dc.contributor.authorVlcek, J.
dc.contributor.authorRezacova, V.
dc.contributor.authorPetrak, V.
dc.contributor.authorKluiber, Z.
dc.contributor.authorFekete, L.
dc.contributor.authorLiehr, M.
dc.contributor.authorNesladek, Milos
dc.date.accessioned2021-10-18T16:20:58Z
dc.date.available2021-10-18T16:20:58Z
dc.date.issued2010
dc.identifier.issn0022-3727
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17101
dc.sourceIIOimport
dc.titleGrowth and characterization of nanodiamond layers prepared using the plasma-enhanced linear antennas microwave CVD system
dc.typeJournal article
dc.contributor.imecauthorNesladek, Milos
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage37018
dc.source.journalJournal of Physics D: Applied Physics
dc.source.issue37
dc.source.volume43
imec.availabilityPublished - open access


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