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Impact of development chemistry on extreme ultraviolet resist performance

dc.contributor.authorGronheid, Roel
dc.date.accessioned2021-10-18T16:45:12Z
dc.date.available2021-10-18T16:45:12Z
dc.date.issued2010
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17193
dc.sourceIIOimport
dc.titleImpact of development chemistry on extreme ultraviolet resist performance
dc.typeJournal article
dc.contributor.imecauthorGronheid, Roel
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageC6S1
dc.source.endpageC6S5
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue6
dc.source.volume28
imec.availabilityPublished - open access


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