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Strontium niobate high-k dielectrics: Film deposition and material properties

dc.contributor.authorHardy, An
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorKittl, Jorge
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.contributor.authorD'Haen, Jan
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorVan Bael, Marlies
dc.contributor.authorVan den Rul, H
dc.contributor.authorMullens, J
dc.date.accessioned2021-10-18T16:53:42Z
dc.date.available2021-10-18T16:53:42Z
dc.date.issued2010
dc.identifier.issn1359-6454
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17225
dc.sourceIIOimport
dc.titleStrontium niobate high-k dielectrics: Film deposition and material properties
dc.typeJournal article
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage216
dc.source.endpage225
dc.source.journalActa Materialia
dc.source.volume58
imec.availabilityPublished - open access


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