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Properties of ultrathin high permittivity NbTaO films prepared by aqueous chemical solution deposition

dc.contributor.authorHardy, An
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorDewulf, Daan
dc.contributor.authorClima, Sergiu
dc.contributor.authorPeys, Nick
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorOpsomer, Karl
dc.contributor.authorFavia, Paola
dc.contributor.authorBender, Hugo
dc.contributor.authorHoflijk, Ilse
dc.contributor.authorConard, Thierry
dc.contributor.authorFranquet, Alexis
dc.contributor.authorVan den Rul, Heidi
dc.contributor.authorKittl, Jorge
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorVan Bael, Marlies K.
dc.contributor.authorMullens, J.
dc.date.accessioned2021-10-18T16:54:05Z
dc.date.available2021-10-18T16:54:05Z
dc.date.issued2010
dc.identifier.issn0013-4651
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17226
dc.sourceIIOimport
dc.titleProperties of ultrathin high permittivity NbTaO films prepared by aqueous chemical solution deposition
dc.typeJournal article
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorClima, Sergiu
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorHoflijk, Ilse
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecClima, Sergiu::0000-0002-4044-9975
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewyes
dc.source.beginpageG13
dc.source.endpageG19
dc.source.journalJournal of the Electrochemical Society
dc.source.issue1
dc.source.volume157
dc.identifier.urlhttp://ecsdl.org/getabs/servlet/GetabsServlet?prog=normal&id=JESOAN000157000001000G13000001&idtype=cvips&gifs=Yes
imec.availabilityPublished - imec


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