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Influence of gasification on the performance of a 1 MHz nozzle system in megasonic cleaning

dc.contributor.authorHauptmann, Marc
dc.contributor.authorBrems, Steven
dc.contributor.authorCamerotto, Elisabeth
dc.contributor.authorZijlstra, Aaldert
dc.contributor.authorDoumen, Geert
dc.contributor.authorBearda, Twan
dc.contributor.authorMertens, Paul
dc.contributor.authorLauriks, Walter
dc.date.accessioned2021-10-18T16:57:27Z
dc.date.available2021-10-18T16:57:27Z
dc.date.issued2010
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17238
dc.sourceIIOimport
dc.titleInfluence of gasification on the performance of a 1 MHz nozzle system in megasonic cleaning
dc.typeJournal article
dc.contributor.imecauthorBrems, Steven
dc.contributor.imecauthorCamerotto, Elisabeth
dc.contributor.imecauthorDoumen, Geert
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecBrems, Steven::0000-0002-0282-8528
dc.source.peerreviewyes
dc.source.beginpage1512
dc.source.endpage1515
dc.source.journalMicroelectronic Engineering
dc.source.issue5_8
dc.source.volume87
imec.availabilityPublished - imec
imec.internalnotesMNE 2009


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