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Ultra-high density MEMS probe memory device

dc.contributor.authorHeck, John
dc.contributor.authorAdams, Donald
dc.contributor.authorBelov, Nicolai
dc.contributor.authorChou, T-K.A.
dc.contributor.authorKim, B.
dc.contributor.authorKornelsen, Kevin
dc.contributor.authorMa, Q.
dc.contributor.authorRao, V.
dc.contributor.authorSeveri, Simone
dc.contributor.authorSpicer, Dean
dc.contributor.authorTchelepi, G.
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-18T16:57:46Z
dc.date.available2021-10-18T16:57:46Z
dc.date.issued2010
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17239
dc.sourceIIOimport
dc.titleUltra-high density MEMS probe memory device
dc.typeJournal article
dc.contributor.imecauthorSeveri, Simone
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1198
dc.source.endpage1203
dc.source.journalMicroelectronic Engineering
dc.source.issue5_8
dc.source.volume87
imec.availabilityPublished - open access
imec.internalnotesMNE 2009


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