Study and characterization of thin indium-nickel membranes for MEMS encapsulation at temperatures below 200°C
dc.contributor.author | Hellin Rico, Raquel | |
dc.date.accessioned | 2021-10-18T16:58:17Z | |
dc.date.available | 2021-10-18T16:58:17Z | |
dc.date.issued | 2010-02 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17241 | |
dc.source | IIOimport | |
dc.title | Study and characterization of thin indium-nickel membranes for MEMS encapsulation at temperatures below 200°C | |
dc.type | PHD thesis | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.contributor.thesisadvisor | Celis, Jean-Pierre | |
dc.contributor.thesisadvisor | Van Hoof, Chris | |
imec.availability | Published - imec |