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Test structure to investigate the series resistance components of source/drain structure

dc.contributor.authorBiesemans, Serge
dc.contributor.authorKubicek, Stefan
dc.contributor.authorDe Meyer, Kristin
dc.date.accessioned2021-09-30T07:57:14Z
dc.date.available2021-09-30T07:57:14Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1740
dc.sourceIIOimport
dc.titleTest structure to investigate the series resistance components of source/drain structure
dc.typeJournal article
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.imecauthorKubicek, Stefan
dc.contributor.imecauthorDe Meyer, Kristin
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage477
dc.source.endpage479
dc.source.journalIEEE Electron Device Letters
dc.source.issue10
dc.source.volume18
imec.availabilityPublished - open access


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