Patterning of inorganic electrets

dc.contributor.author	Leonov, Vladimir
dc.contributor.author	van Schaijk, Rob
dc.date.accessioned	2021-10-18T18:12:29Z
dc.date.available	2021-10-18T18:12:29Z
dc.date.issued	2010
dc.identifier.issn	1070-9878
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/17477
dc.source	IIOimport
dc.title	Patterning of inorganic electrets
dc.type	Journal article
dc.contributor.imecauthor	Leonov, Vladimir
dc.contributor.orcidimec	Leonov, Vladimir::0000-0002-4364-8945
dc.date.embargo	9999-12-31
dc.source.peerreview	yes
dc.source.beginpage	994
dc.source.endpage	1000
dc.source.journal	IEEE Transactions on Dielectrics and Electrical Insulation
dc.source.issue	4
dc.source.volume	17
imec.availability	Published - open access