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Direct visualization and in-depth physical study of metal filament formation in percolated high-k dielectrics

dc.contributor.authorLi, X.
dc.contributor.authorPey, K.L.
dc.contributor.authorBosman, M.
dc.contributor.authorLiu, W.H.
dc.contributor.authorKauerauf, Thomas
dc.date.accessioned2021-10-18T18:15:49Z
dc.date.available2021-10-18T18:15:49Z
dc.date.issued2010
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17487
dc.sourceIIOimport
dc.titleDirect visualization and in-depth physical study of metal filament formation in percolated high-k dielectrics
dc.typeJournal article
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage22903
dc.source.journalApplied Physics Letters
dc.source.issue2
dc.source.volume96
imec.availabilityPublished - open access


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