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Hydrogen and inert species in solid phase epitaxy

dc.contributor.authorLieten, Ruben
dc.contributor.authorDegroote, Stefan
dc.contributor.authorClemente, Francesca
dc.contributor.authorLeys, Maarten
dc.contributor.authorBorghs, Gustaaf
dc.date.accessioned2021-10-18T18:18:10Z
dc.date.available2021-10-18T18:18:10Z
dc.date.issued2010
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17494
dc.sourceIIOimport
dc.titleHydrogen and inert species in solid phase epitaxy
dc.typeJournal article
dc.contributor.imecauthorBorghs, Gustaaf
dc.source.peerreviewyes
dc.source.beginpage52109
dc.source.journalApplied Physics Letters
dc.source.issue5
dc.source.volume96
dc.identifier.urlhttp://link.aip.org/link/?APPLAB/96/052109/1
imec.availabilityPublished - imec


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