Hydrogen and inert species in solid phase epitaxy
dc.contributor.author | Lieten, Ruben | |
dc.contributor.author | Degroote, Stefan | |
dc.contributor.author | Clemente, Francesca | |
dc.contributor.author | Leys, Maarten | |
dc.contributor.author | Borghs, Gustaaf | |
dc.date.accessioned | 2021-10-18T18:18:10Z | |
dc.date.available | 2021-10-18T18:18:10Z | |
dc.date.issued | 2010 | |
dc.identifier.issn | 0003-6951 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17494 | |
dc.source | IIOimport | |
dc.title | Hydrogen and inert species in solid phase epitaxy | |
dc.type | Journal article | |
dc.contributor.imecauthor | Borghs, Gustaaf | |
dc.source.peerreview | yes | |
dc.source.beginpage | 52109 | |
dc.source.journal | Applied Physics Letters | |
dc.source.issue | 5 | |
dc.source.volume | 96 | |
dc.identifier.url | http://link.aip.org/link/?APPLAB/96/052109/1 | |
imec.availability | Published - imec |
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