dc.contributor.author | Machkaoutsan, Vladimir | |
dc.contributor.author | Verheyen, Peter | |
dc.contributor.author | Bauer, M. | |
dc.contributor.author | Zhang, Y. | |
dc.contributor.author | Koelling, Sebastian | |
dc.contributor.author | Franquet, Alexis | |
dc.contributor.author | Vanormelingen, Koen | |
dc.contributor.author | Loo, Roger | |
dc.contributor.author | Kim, C.S. | |
dc.contributor.author | Lauwers, Anne | |
dc.contributor.author | Horiguchi, Naoto | |
dc.contributor.author | Kerner, Christoph | |
dc.contributor.author | Hoffmann, Thomas | |
dc.contributor.author | Granneman, E. | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Absil, Philippe | |
dc.contributor.author | Thomas, S.G. | |
dc.date.accessioned | 2021-10-18T18:35:44Z | |
dc.date.available | 2021-10-18T18:35:44Z | |
dc.date.issued | 2010 | |
dc.identifier.issn | 0167-9317 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17543 | |
dc.source | IIOimport | |
dc.title | Electrical demonstration of thermally stable Ni silicides on Si1-xCx epitaxial layers | |
dc.type | Journal article | |
dc.contributor.imecauthor | Machkaoutsan, Vladimir | |
dc.contributor.imecauthor | Verheyen, Peter | |
dc.contributor.imecauthor | Franquet, Alexis | |
dc.contributor.imecauthor | Loo, Roger | |
dc.contributor.imecauthor | Lauwers, Anne | |
dc.contributor.imecauthor | Horiguchi, Naoto | |
dc.contributor.imecauthor | Kerner, Christoph | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.imecauthor | Absil, Philippe | |
dc.contributor.orcidimec | Franquet, Alexis::0000-0002-7371-8852 | |
dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 306 | |
dc.source.endpage | 310 | |
dc.source.journal | Microelectronic Engineering | |
dc.source.issue | 3 | |
dc.source.volume | 87 | |
dc.identifier.url | http://dx.doi.org/10.1016/j.mee.2009.06.019 | |
imec.availability | Published - open access | |