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AlGaN-on-Si backside illuminated photodetectors for the extreme ultraviolet (EUV) range

dc.contributor.authorMalinowski, Pawel
dc.contributor.authorDuboz, Jean-Yves
dc.contributor.authorJohn, Joachim
dc.contributor.authorSturdevant, Charles
dc.contributor.authorDas, Jo
dc.contributor.authorDerluyn, Joff
dc.contributor.authorGermain, Marianne
dc.contributor.authorDe Moor, Piet
dc.contributor.authorMinoglou, Kiki
dc.contributor.authorSemond, Fabrice
dc.contributor.authorFrayssinet, Eric
dc.contributor.authorHochedez, Jean-Francois
dc.contributor.authorGiordanengo, Boris
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorMertens, Robert
dc.date.accessioned2021-10-18T18:41:56Z
dc.date.available2021-10-18T18:41:56Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17560
dc.sourceIIOimport
dc.titleAlGaN-on-Si backside illuminated photodetectors for the extreme ultraviolet (EUV) range
dc.typeProceedings paper
dc.contributor.imecauthorMalinowski, Pawel
dc.contributor.imecauthorJohn, Joachim
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.imecauthorMertens, Robert
dc.contributor.orcidimecMalinowski, Pawel::0000-0002-2934-470X
dc.source.peerreviewno
dc.source.beginpage772617
dc.source.conferenceOptical Sensing and Detection
dc.source.conferencedate12/04/2010
dc.source.conferencelocationBrussels Belgium
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 7726


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