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Porogen residues detection in optical properties of low-k dielectrics cured by ultraviolet radiation

dc.contributor.authorMarsik, P.
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorDe Roest, David
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-18T18:52:37Z
dc.date.available2021-10-18T18:52:37Z
dc.date.issued2010
dc.identifier.issn0040-6090
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17590
dc.sourceIIOimport
dc.titlePorogen residues detection in optical properties of low-k dielectrics cured by ultraviolet radiation
dc.typeJournal article
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorDe Roest, David
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.source.peerreviewyes
dc.source.beginpage4266
dc.source.endpage4272
dc.source.journalThin Solid Films
dc.source.issue15
dc.source.volume518
imec.availabilityPublished - imec


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