dc.contributor.author | Nyns, Laura | |
dc.contributor.author | Delabie, Annelies | |
dc.contributor.author | Swerts, Johan | |
dc.contributor.author | Van Elshocht, Sven | |
dc.contributor.author | De Gendt, Stefan | |
dc.date.accessioned | 2021-10-18T19:44:29Z | |
dc.date.available | 2021-10-18T19:44:29Z | |
dc.date.issued | 2010 | |
dc.identifier.issn | 0013-4651 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17719 | |
dc.source | IIOimport | |
dc.title | ALD and parasitic growth characteristics of the tetrakisethylmethylamino hafnium TEMAH/H2O process | |
dc.type | Journal article | |
dc.contributor.imecauthor | Nyns, Laura | |
dc.contributor.imecauthor | Delabie, Annelies | |
dc.contributor.imecauthor | Swerts, Johan | |
dc.contributor.imecauthor | Van Elshocht, Sven | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.orcidimec | Nyns, Laura::0000-0001-8220-870X | |
dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | G225 | |
dc.source.endpage | G229 | |
dc.source.journal | Journal of the Electrochemical Society | |
dc.source.issue | 11 | |
dc.source.volume | 157 | |
imec.availability | Published - open access | |