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Review of electrical characterization of ultra-shallow junctions with micro four-point probes

dc.contributor.authorPetersen, Dirch
dc.contributor.authorHansen, Ole
dc.contributor.authorHansen, Torben
dc.contributor.authorBoggild, Peter
dc.contributor.authorLin, Rong
dc.contributor.authorKjaer, Daniel
dc.contributor.authorNielsen, Peter F.
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorRosseel, Erik
dc.contributor.authorBennett, Nick
dc.contributor.authorCowern, Nick
dc.date.accessioned2021-10-18T20:15:23Z
dc.date.available2021-10-18T20:15:23Z
dc.date.issued2010
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17797
dc.sourceIIOimport
dc.titleReview of electrical characterization of ultra-shallow junctions with micro four-point probes
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorRosseel, Erik
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageC1C27
dc.source.endpageC1C33
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue1
dc.source.volume28
imec.availabilityPublished - open access


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