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Stress gradient in polycrystalline aluminum nitride thin films

dc.contributor.authorPobedinskas, P.
dc.contributor.authorMortet, Vincent
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-18T20:21:36Z
dc.date.available2021-10-18T20:21:36Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17813
dc.sourceIIOimport
dc.titleStress gradient in polycrystalline aluminum nitride thin films
dc.typeOral presentation
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.conferenceHasselt Diamond Workshop - SBDD XV
dc.source.conferencedate22/02/2010
dc.source.conferencelocationHasselt Belgium
imec.availabilityPublished - imec


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