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Characterization of a FinFET 6T-SRAM cell by tomography

dc.contributor.authorRichard, Olivier
dc.contributor.authorDemuynck, Steven
dc.contributor.authorVeloso, Anabela
dc.contributor.authorVan Marcke, Patricia
dc.contributor.authorBender, Hugo
dc.date.accessioned2021-10-18T20:48:53Z
dc.date.available2021-10-18T20:48:53Z
dc.date.issued2010
dc.identifier.issn1742-6588
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17880
dc.sourceIIOimport
dc.titleCharacterization of a FinFET 6T-SRAM cell by tomography
dc.typeJournal article
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorVan Marcke, Patricia
dc.contributor.imecauthorBender, Hugo
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage12047
dc.source.journalJournal of Physics Conference Series
dc.source.issue1
dc.source.volume209
dc.identifier.urlhttp://iopscience.iop.org/1742-6596/209/1/012047/pdf/1742-6596_209_1_012047.pdf
imec.availabilityPublished - open access
imec.internalnotes16th Int. Conf. Microscopy of Semiconducting Materials


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