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Study of submelt laser induced junction nonuniformities using Therma-Probe

dc.contributor.authorRosseel, Erik
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorOrtolland, Claude
dc.contributor.authorHoffmann, Thomas Y.
dc.contributor.authorSalnik, Alex
dc.contributor.authorNicolaides, Lena
dc.contributor.authorHan, Sang-Hyun
dc.contributor.authorPetersen, Dirch
dc.contributor.authorLin, Rong
dc.contributor.authorHansen, Ole
dc.date.accessioned2021-10-18T21:00:07Z
dc.date.available2021-10-18T21:00:07Z
dc.date.issued2010
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17907
dc.sourceIIOimport
dc.titleStudy of submelt laser induced junction nonuniformities using Therma-Probe
dc.typeJournal article
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageC1C21
dc.source.endpageC1C26
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue1
dc.source.volume28
imec.availabilityPublished - open access


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