dc.contributor.author | Rudra, Sukumar | |
dc.contributor.author | Roels, Joris | |
dc.contributor.author | Bryce, George | |
dc.contributor.author | Haspeslagh, Luc | |
dc.contributor.author | Witvrouw, Ann | |
dc.contributor.author | Van Thourhout, Dries | |
dc.date.accessioned | 2021-10-18T21:03:36Z | |
dc.date.available | 2021-10-18T21:03:36Z | |
dc.date.issued | 2010 | |
dc.identifier.issn | 0167-9317 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17915 | |
dc.source | IIOimport | |
dc.title | SiGe based grating light valves: a leap towards monolithic integration of MOEMS | |
dc.type | Journal article | |
dc.contributor.imecauthor | Bryce, George | |
dc.contributor.imecauthor | Haspeslagh, Luc | |
dc.contributor.imecauthor | Van Thourhout, Dries | |
dc.contributor.orcidimec | Van Thourhout, Dries::0000-0003-0111-431X | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 1195 | |
dc.source.endpage | 1197 | |
dc.source.journal | Microelectronic Engineering | |
dc.source.issue | 5_8 | |
dc.source.volume | 87 | |
imec.availability | Published - open access | |
imec.internalnotes | MNE 2009 | |