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SiGe based grating light valves: a leap towards monolithic integration of MOEMS

dc.contributor.authorRudra, Sukumar
dc.contributor.authorRoels, Joris
dc.contributor.authorBryce, George
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorVan Thourhout, Dries
dc.date.accessioned2021-10-18T21:03:36Z
dc.date.available2021-10-18T21:03:36Z
dc.date.issued2010
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17915
dc.sourceIIOimport
dc.titleSiGe based grating light valves: a leap towards monolithic integration of MOEMS
dc.typeJournal article
dc.contributor.imecauthorBryce, George
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1195
dc.source.endpage1197
dc.source.journalMicroelectronic Engineering
dc.source.issue5_8
dc.source.volume87
imec.availabilityPublished - open access
imec.internalnotesMNE 2009


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