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Impact of design factors and environment on the electrostatic discharge sensitivity of MEMS micromirrors

dc.contributor.authorSangameswaran, Sandeep
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-18T21:12:31Z
dc.date.available2021-10-18T21:12:31Z
dc.date.issued2010
dc.identifier.issn0026-2714
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17936
dc.sourceIIOimport
dc.titleImpact of design factors and environment on the electrostatic discharge sensitivity of MEMS micromirrors
dc.typeJournal article
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.beginpage1383
dc.source.endpage1387
dc.source.journalMicroelectronics Reliability
dc.source.issue9_11
dc.source.volume50
dc.identifier.urlhttp://dx.doi.org/10.1016/j.microrel.2010.07.079
imec.availabilityPublished - imec
imec.internalnotesESREF 2010 paper


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