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Thermal trimming and tuning of hydrogenated amorphous silicon nanophotonic devices

dc.contributor.authorSelvaraja, Shankar
dc.contributor.authorBogaerts, Wim
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorSchaekers, Marc
dc.date.accessioned2021-10-18T21:27:00Z
dc.date.available2021-10-18T21:27:00Z
dc.date.issued2010
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17970
dc.sourceIIOimport
dc.titleThermal trimming and tuning of hydrogenated amorphous silicon nanophotonic devices
dc.typeJournal article
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage71120
dc.source.journalApplied Physics Letters
dc.source.issue7
dc.source.volume97
imec.availabilityPublished - open access


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