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Physical Loss Mechanisms for resonant acoustical waves in Boron doped poly-SiGe deposited with Hydrogen dilution

dc.contributor.authorStoffels, Steve
dc.contributor.authorAutizi, Enrico
dc.contributor.authorVan Hoof, Rita
dc.contributor.authorSeveri, Simone
dc.contributor.authorPuers, Bob
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-18T22:01:02Z
dc.date.available2021-10-18T22:01:02Z
dc.date.issued2010-11
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18044
dc.sourceIIOimport
dc.titlePhysical Loss Mechanisms for resonant acoustical waves in Boron doped poly-SiGe deposited with Hydrogen dilution
dc.typeJournal article
dc.contributor.imecauthorStoffels, Steve
dc.contributor.imecauthorVan Hoof, Rita
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage84517
dc.source.journalJournal of Applied Physics
dc.source.issue8
dc.source.volume108
imec.availabilityPublished - open access


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