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Stable patterned electrets for MEMS based energy harvesters

dc.contributor.authorVan Bavel, Mieke
dc.contributor.authorLeonov, Vladimir
dc.contributor.authorvan Schaijk, Rob
dc.date.accessioned2021-10-18T22:49:36Z
dc.date.available2021-10-18T22:49:36Z
dc.date.issued2010-09
dc.identifier.issn?
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18150
dc.sourceIIOimport
dc.titleStable patterned electrets for MEMS based energy harvesters
dc.typeJournal article
dc.contributor.imecauthorVan Bavel, Mieke
dc.contributor.imecauthorLeonov, Vladimir
dc.contributor.orcidimecLeonov, Vladimir::0000-0002-4364-8945
dc.source.peerreviewno
dc.source.journalMEMS Investor Journal
dc.identifier.urlhttp://www.memsinvestorjournal.com/2010/09/stable-patterned-electrets-for-mems-based-energy-harvesters.html
imec.availabilityPublished - imec


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