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dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorHoward, Dave
dc.contributor.authorLauwers, Anne
dc.contributor.authorMaex, Karen
dc.contributor.authorMaes, Herman
dc.date.accessioned2021-09-30T08:07:51Z
dc.date.available2021-09-30T08:07:51Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1827
dc.sourceIIOimport
dc.titleLocal identification and mapping of the C49 and C54 titanium phases in submicron structures by micro-Raman spectroscopy
dc.typeJournal article
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorMaex, Karen
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage2262
dc.source.endpage2264
dc.source.journalAppl. Phys. Lett.
dc.source.issue17
dc.source.volume70
imec.availabilityPublished - open access


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