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Chemical analysis of nickel silicides with high spatial resolution by combined EDS, EELS and ELNES

dc.contributor.authorVerleysen, Eveline
dc.contributor.authorBender, Hugo
dc.contributor.authorSchryvers, Dominique
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-18T23:51:19Z
dc.date.available2021-10-18T23:51:19Z
dc.date.issued2010
dc.identifier.issn1742-6588
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18281
dc.sourceIIOimport
dc.titleChemical analysis of nickel silicides with high spatial resolution by combined EDS, EELS and ELNES
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewyes
dc.source.beginpage12057
dc.source.journalJournal of Physics Conference Series
dc.source.issue1
dc.source.volume209
imec.availabilityPublished - imec


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