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La tecnologia SiGe per i MEMS

dc.contributor.authorWitvrouw, Ann
dc.contributor.authorSeveri, Simone
dc.contributor.authorHelin, Philippe
dc.contributor.authorHaspeslagh, Luc
dc.date.accessioned2021-10-19T00:32:52Z
dc.date.available2021-10-19T00:32:52Z
dc.date.issued2010
dc.identifier.issn?
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18363
dc.sourceIIOimport
dc.titleLa tecnologia SiGe per i MEMS
dc.typeJournal article
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorHaspeslagh, Luc
dc.source.peerreviewno
dc.source.beginpage100
dc.source.endpage101
dc.source.journalSelezione di Elettronica
imec.availabilityPublished - imec


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