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SiGe MEMS technology: a platform technology enabling different demonstrators

dc.contributor.authorWitvrouw, Ann
dc.contributor.authorVan Hoof, Rita
dc.contributor.authorBryce, George
dc.contributor.authorDu Bois, Bert
dc.contributor.authorVerbist, Agnes
dc.contributor.authorSeveri, Simone
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorOsman, Haris
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorWen, Lianggong
dc.contributor.authorPuers, Bob
dc.contributor.authorBeernaert, Roel
dc.contributor.authorDe Smet, Herbert
dc.contributor.authorRudra, Sukumar
dc.contributor.authorVan Thourhout, Dries
dc.date.accessioned2021-10-19T00:33:58Z
dc.date.available2021-10-19T00:33:58Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18365
dc.sourceIIOimport
dc.titleSiGe MEMS technology: a platform technology enabling different demonstrators
dc.typeMeeting abstract
dc.contributor.imecauthorVan Hoof, Rita
dc.contributor.imecauthorBryce, George
dc.contributor.imecauthorDu Bois, Bert
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorOsman, Haris
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorDe Smet, Herbert
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidimecDu Bois, Bert::0000-0003-0147-1296
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1937
dc.source.conference218th ECS Conference
dc.source.conferencedate10/10/2010
dc.source.conferencelocationLas Vegas, NV USA
imec.availabilityPublished - open access
imec.internalnotesECS Meeting Abstracts; Vol. MA2010-02


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