High-density growth of horizontally aligned carbon nanotubes for interconnects
dc.contributor.author | Yan, F. | |
dc.contributor.author | Zhang, Can | |
dc.contributor.author | Cott, Daire | |
dc.contributor.author | Robertson, John | |
dc.date.accessioned | 2021-10-19T00:40:48Z | |
dc.date.available | 2021-10-19T00:40:48Z | |
dc.date.issued | 2010 | |
dc.identifier.issn | 0370-1972 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18379 | |
dc.source | IIOimport | |
dc.title | High-density growth of horizontally aligned carbon nanotubes for interconnects | |
dc.type | Journal article | |
dc.contributor.imecauthor | Cott, Daire | |
dc.source.peerreview | yes | |
dc.source.beginpage | 2669 | |
dc.source.endpage | 2672 | |
dc.source.journal | Physica Status Solidi B | |
dc.source.issue | 11_12 | |
dc.source.volume | 247 | |
imec.availability | Published - imec |
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