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TiNx/HfO2 interface dipole induced by oxygen scavenging

dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorStesmans, Andre
dc.contributor.authorPantisano, Luigi
dc.contributor.authorCimino, S.
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorGoux, Ludovic
dc.contributor.authorChen, Yangyin
dc.contributor.authorKittl, Jorge
dc.contributor.authorWouters, Dirk
dc.contributor.authorJurczak, Gosia
dc.date.accessioned2021-10-19T12:28:30Z
dc.date.available2021-10-19T12:28:30Z
dc.date.issued2011
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18455
dc.sourceIIOimport
dc.titleTiNx/HfO2 interface dipole induced by oxygen scavenging
dc.typeJournal article
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.imecauthorStesmans, Andre
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.imecauthorChen, Yangyin
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.source.peerreviewyes
dc.source.beginpage132901
dc.source.journalApplied Physics Letters
dc.source.issue13
dc.source.volume98
dc.identifier.urlhttp://dx.doi.org/10.1063/1.3570647
imec.availabilityPublished - imec


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