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Impact of SEG on uniaxially strained MuGFET performance

dc.contributor.authorAgopian, P.
dc.contributor.authorPacheco, V.
dc.contributor.authorMartino, J.A.
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-10-19T12:28:31Z
dc.date.available2021-10-19T12:28:31Z
dc.date.issued2011
dc.identifier.issn0038-1101
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18456
dc.sourceIIOimport
dc.titleImpact of SEG on uniaxially strained MuGFET performance
dc.typeJournal article
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage13
dc.source.endpage17
dc.source.journalSolid-State Electronics
dc.source.issue1
dc.source.volume59
imec.availabilityPublished - open access


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